Cleanroom Technologies/Support

 

Technologies have been developed to cater to the escalating demands of the clean room as ICs become more complex. A network interconnects Cleanrooms, forming a highly flexible system of automated workstations, and equipped with standardized electronic and mechanical components and interfaces for each of the numerous tools.

 

The size and number of particles landing on the wafer surfaces during IC fabrication is a critical subject. Clean rooms must have furnishings built to the highest tolerances, and with the best finishes possible enable contamination prevention, and molecular contamination control. Bargain fittings may produce particulates that contaminate and bring down yields. In addition, to prevent contamination to the wafer, clean room personnel are required put on specialized garments and undertake a thorough cleansing process before entry.