Factory Automation And Robotics

 

There are three main categories within automation; factory automation hardware, factory automation software and tool automation. Factory automation includes intra-bay and inter-bay systems, which move wafers between processing systems, and equipment systems, plus wafer storage and carriers, and sorting systems.

 

Factory automation software refers to the linking of manufacturing execution systems, cell and material control, scheduling, advanced process control and data analysis. Tool automation includes tool interface, wafer handling robotics and integrated front ends. Automation allows companies to enjoy cost savings through the benefits of process management.