OEM Subsystems And Components

 

OEM Subsystems form an important part of the semiconductor process tool. It is an arrangement of integrated components used in wafer processing equipment. Sub-segments include laser technologies, advanced power technologies, tool automation technologies, vacuum technologies and gas modules.

 

OEM Subsystem developers perform a lot of research and development; hence the equipment supplier often develops upgrades. Sometimes these are new software revisions. However, they are often complex subsystem enhancements that require changes to the system's mechanical, electronic and software components. These changes also often require changes to process recipe files and other configuration parameters of the system.